USA - California - Stanford - Stanford University - Materials & Engineering - Nanoscale Materials Science - MSE323: Thin Film and Interface Microanalysis

MSE323: Thin Film and Interface Microanalysis

Course Description | Course Details | Course Topics

The science and technology of a variety of microanalytical techniques, including Auger electron spectroscopy (AES), Rutherford backscattering spectroscopy (RBS), secondary ion mass spectroscopy (SIMS), ion scattering spectroscopy (ISS), and x-ray photoelectron spectroscopy (XPS or ESCA). Generic processes such as sputtering and high-vacuum generation.

Some prior exposure to atomic and electronic structure of solids.



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